Automatic Wafer Transfer System, Mactronix


Quantity: In Stock

Category: Wafer Handling and Inspection

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  • The MacLite Senior Series with junior function, transfers wafers between two 25 Slot Carriers and one 50 slot Process boat. Carriers/boats can be plastic, Teflon®, Quartz, Silicon Carbide, Polysilicon and metal boats.
  • Fast & Smooth, featuring ramped speeds. A 50 wafer transfer is under 56 seconds.
  • Operator interface is with a 12 key keypad with a 4 line LCD display.
  • MacLite machines are totally electronic, with an auto switching power supply, 110 Vac 60 Hz or 240 Vac 50/60 Hz. 
  • The machine will not introduce more than 1.5 particles, greater than .23 micron in diameter, per wafer per transfer (machine must be exhausted to achieve this figure).
  • Single Board PC controlled.
  • Sensors detect wafers and cassette or process carrier presence for safety.
  • Flat alignment is maintained during transfer.
  • Machine will not drop wafers in the event of a power failure and will prompt the operator through the Recovery Mode after power has been restored.

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Automatic Wafer Transfer System, Mactronix


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