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Mactronix MacLite Senior Series Automatic Wafer Transfer System High-Speed Semiconductor Wafer Handler with 25-Slot Cassette & 50-Slot Boat Compatibility, Low Particle Contamination & Intelligent Safety Control
The MacLite system features a user-friendly 12-key keypad with a 4-line LCD display, providing simple and intuitive operator control. Built on a fully electronic architecture with an auto-switching power supply (110V/240V), it ensures stable operation across global manufacturing environments.
Advanced sensor technology detects wafer presence and carrier positioning for maximum safety, while maintaining flat alignment throughout the transfer process. The system is designed to prevent wafer drop even during power failure and includes an intelligent recovery mode that guides the operator once power is restored, ensuring process continuity and wafer protection.
Key Features / Advantages
- High-speed wafer transfer: 50 wafers in under 56 seconds
- Compatible with 25-slot carriers and 50-slot process boats
- Supports multiple materials including quartz, Teflon®, SiC, polysilicon, and metal
- Low particle contamination: ≤1.5 particles >0.23µm per wafer per transfer
- Ramped speed control for smooth and gentle wafer handling
- 12-key keypad with 4-line LCD display for easy operation
- Single-board PC controlled system for stable performance
- Built-in safety sensors for wafer and carrier detection
- Maintains wafer flat alignment during full transfer cycle
- Power failure protection with automatic recovery mode
- Auto-switching power supply (110V / 240V, 50/60Hz)
Technical Specifications
| System Type | Automatic Wafer Transfer System (MacLite Senior Series) |
| Manufacturer | Mactronix |
| Transfer Capability | 25-slot carriers and 50-slot process boat handling |
| Supported Materials | Plastic, Teflon®, Quartz, Silicon Carbide, Polysilicon, Metal Boats |
| Transfer Speed | 50 wafers in under 56 seconds |
| Particle Control | ≤ 1.5 particles >0.23 µm per wafer per transfer (with exhaust) |
| Control Interface | 12-key keypad with 4-line LCD display |
| Control System | Single Board PC Controlled System |
| Power Supply | Auto-switching 110 VAC 60Hz / 240 VAC 50–60Hz |
| Safety Features | Wafer and carrier presence sensors |
| Alignment Control | Maintains wafer flat alignment during transfer |
| Power Failure Protection | No wafer drop; automatic recovery mode after power restoration |
| Application | Semiconductor wafer handling and cleanroom automation |
Upgrade your semiconductor automation with the Mactronix MacLite Senior Series Wafer Transfer System—contact us today for pricing, technical details, or customised cleanroom wafer handling solutions.
Inquiry - Automatic Wafer Transfer System, Mactronix
