The MacLite Senior Series with junior function, transfers wafers between two 25 Slot Carriers and one 50 slot Process boat. Carriers/boats can be plastic, Teflon®, Quartz, Silicon Carbide, Polysilicon and metal boats.
Fast & Smooth, featuring ramped speeds. A 50 wafer transfer is under 56 seconds.
Operator interface is with a 12 key keypad with a 4 line LCD display.
MacLite machines are totally electronic, with an auto switching power supply, 110 Vac 60 Hz or 240 Vac 50/60 Hz.
The machine will not introduce more than 1.5 particles, greater than .23 micron in diameter, per wafer per transfer (machine must be exhausted to achieve this figure).
Single Board PC controlled.
Sensors detect wafers and cassette or process carrier presence for safety.
Flat alignment is maintained during transfer.
Machine will not drop wafers in the event of a power failure and will prompt the operator through the Recovery Mode after power has been restored.
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Automatic Wafer Transfer System, Mactronix
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