The Automatic Wafer Sorter machine transfer wafers between two 25-slot cassettes stacked vertically. Depending on sort routine selected, one cassette may be swapped out for another within the same sort operation.
User friendly, menu driven programming for operator and maintenance mode provides complete flexibility.
Transfers may be accomplished through keypad commands and may be programmed for specific, customized sequences.
The Operator menu allows wafer sorting and combining by one of two methods:
2.) Preprogrammed Sort Routines
The Technician menu enables rapid machine diagnostics and testing.
Wafers are memory mapped and monitored while in the cassettes and are vacuum sensed and monitored during robotic transfers to inhibit accidental damage.
When wafers need to be specifically orientated in a cassette, optical flat finding is by one of four programmed positions
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Automatic Wafer Sorter, Mactronix
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