It provides state-of-the-art functions to measure such materials as filled cell gap on LCD, polyimide on ITO, color filter CIE chromaticity, and color filter thickness.
It also able to measure common materials like Oxide, Nitride, Photoresist and Polysilicon films.
The powerful software algorithms can perform single, double, and triple layer thickness calculations.
Scanning Range : 380nm to 950nm, standard
Optional Range : The option exists for different scanning ranges depending on different gratings chosen, such as : 200-575 nm, 250-800 nm, 530-1000 nm, 200-450 nm, or the combination of these gratings can provide a scanning range from 200-1000 nm
Spectrum Resolution : 2 nm
Precision : 0.1 nm
Measurement Speed : 2 sec.
Measurement Spot Size : Varies by Magnification; 50 microns at 5x magnification, 25 microns at 10x magnification, and 7 microns at 40x magnification
For greater precision, inquire about Custom Built Unit
Viewing Methods : 2.7'' inches wide video view screen and regular trinocular microscope lens can be used to view the measurement spot.
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Thin film Measurement with Microscope, MPO
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