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300mm Wafer Inspection Microscope, MTM-MX-12R
300mm Wafer Inspection Microscope MTM-MX-12R High Precision Semiconductor Wafer Inspection System with Motorized 6-Position Objectives, Brightfield/Darkfield/DIC & Ergonomic Tilting Optics
Engineered for operator comfort and flexibility, the system includes an ergonomic tilting binocular head (0°–35°) and a trinocular port for seamless camera integration. The high eye-point 10X/25mm eyepiece with adjustable diopter ensures comfortable long-duration use in industrial and laboratory environments.
The motorized 6-position objective changer supports a wide range of magnifications (5X to 100X), while advanced inspection techniques including brightfield, darkfield, DIC, and polarization enable comprehensive surface and defect analysis. Combined with precision XY stage control and high-intensity reflected illumination, this system delivers exceptional performance for 300mm wafer inspection applications.
Key Features / Advantages
- Designed for 300mm semiconductor wafer inspection
- Anti-vibration structure with 6-point support stability system
- Low center of gravity design for enhanced imaging precision
- Color-corrected infinity optical system for sharp image clarity
- Ergonomic 0°–35° tilting binocular head for operator comfort
- Trinocular port for camera and digital imaging integration
- High eye-point 10X/25mm eyepiece with adjustable diopter
- Motorized 6-position objective changer for fast magnification switching
- Multiple inspection modes: Brightfield, Darkfield, DIC, Polarization
- Precision XY stage with 305mm × 356mm travel range
- Coaxial coarse & fine focus with 0.001mm fine resolution
- High-intensity 12V 100W reflected illumination system
Technical Specifications
| Model | MTM-MX-12R |
| Application | 300mm Wafer Inspection Microscope |
| Optical System | Color-corrected infinity optical system |
| Head Type | Binocular (0°–35° tilt) / Trinocular available |
| Eyepiece | 10X / 25mm high eye-point, adjustable diopter |
| Focus System | Coaxial coarse & fine focus, 35mm coarse travel, 0.001mm fine precision |
| Objective System | Motorized 6-position changer |
| Objective Magnification | 5X, 10X, 20X, 50X, 100X |
| Inspection Modes | Brightfield, Darkfield, DIC, Polarization |
| Filter System | Neutral, Red, Green, Blue filters |
| Illumination | 12V 100W reflected light source |
| Stage Travel | 305 mm × 356 mm, 3-layer working stage with clutch control |
| Structure | Anti-vibration design with 6 support base system |
Enhance your semiconductor inspection accuracy with the MTM-MX-12R 300mm Wafer Inspection Microscope—contact us today for quotation, technical consultation, or customised wafer inspection solutions for advanced manufacturing environments.
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